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We summarized the current enhancement standing from the high-electricity DUV laser the two at the wavelength of FHG from the one-μm laser and at 193 nm. The recent growth from the stable-state/fiber laser, in addition to the nonlinear optical crystals, prompts not just the standard power but will also the beam top quality (coherence) of your DUV lasers to an unprecedented degree.
The common power on the NIR laser however has the opportunity being improved to tens of watts like 70 W [26] if the double-go configuration may be utilized for that Yb:YAG SCF amplifier phase. That's why, If your conversion performance of 31% from NIR to DUV might be continue to maintained at this better power issue, the standard output energy on the DUV laser at 258 nm can be much more than 20 W, which might be a extraordinary electric power level to the DUV laser and bring on the unanticipated DUV laser machining benefits. What's more, for top-electric power DUV laser, the UV damage from the nonlinear crystal, such as the Home windows for CLBO crystal along with the mirrors, is an additional crucial parameter for long lasting and stable operation.
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Because of the thermal lens impact within the reliable-state lasers, When the heating administration is insufficient, It's not easy to acquire the sound-condition laser which has a substantial power and also a high beam good quality simultaneously. Not long ago, with the event of the thin disk laser and single-crystal fiber (SCF) laser, a substantial-ability laser at the fundamental wavelength click here (1 μm) had been recognized with a fantastic beam excellent Despite having a TEM00 mode beam [4,24], which might be great candidates for the basic with the DUV laser technology. Another candidate for the fundamental would be the superior-electric power fiber laser which may very well be realized by coherent beam blend with M2 worth under 1.
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The beam profile revealed in Figure 7b shown a good beam top quality as one of several merits of Raman laser, which might be advantageous to generate a 193-nm DUV laser with a high quality beam.
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